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Fabrication: Device gallery

We make small devices with techniques of electron beam lithography.

Followings are scanning electron micrographs of our devices.


Quad quantum dot ver. 2
I am inspired by a four-leaf clover. 









Quad quantum dot
It becomes complicated.









Large quantum point contact










Device for charge deterction with quantum point contact ver. 2
We made the gaps wider.









Device for charge deterction with quantum point contact
Gaps between the gates are too small to survive in a season of static electricity.









Circular simple quantum dot










Double side-coupled quantum dot ver. 2
The size is smaller.









Double side-coupled quantum dot










My first electron beam lithography